Calibration Setup

1. If the system's original scanner parameters are deleted, copy the scanner parameters from the Equip.bak directory located in D:\DI Service. Individually purchased scanners are shipped with a head/scanner disk containing backup files or a hard copy of the scanner parameters.
2. In the event that files are not found, contact Bruker for scanner calibration records.

1. Load the silicon calibration reference into the SPM.
2. Align the reference with the microscope scanner so that the tip scans parallel to the reference’s features with the Scan angle set at 0 degrees:

3. Align the reference within approximately 2º of perpendicularity to the scan axes.

Set parameters in the control panels to the following values:

Panel	Parameter	Setting
Scan Controls	Scan Size	440 V
	X Offset	0.00 nm
	Y Offset	0.00 nm
	Scan Angle	0.00 deg
	Scan Rate	2.44 Hz
	Lines	256
	Slow Scan Axis	Enabled
	Z Limit	330 V
Other Controls	Units	Volts
Channel 1	Data Type	Height
	Data Scale	~20 V*

*Adjust the Data Scale parameter to obtain the best contrast.

1. Click the Select Experiment icon to open the Select Experiment window.

2. Select Contact Mode in the Choose an Experiment Category panel.

3. Select Contact Mode In Air in the Select Experiment Group panel.
4. Select Contact Mode In Air in the Select Experiment panel and click Load Experiment.
5. Set the Scan Angle to 0 degrees.
6. Adjust scan parameters:
   • Scan Size: 440 V
   • Scan Rate: 2.44 Hz
   • Lines: 256
7. With the sample engaged, check the scanning line relative to the reference features; the scan should be orthogonal to the pits on the reference.
8. If the reference requires rotation, withdraw and rotate the sample to improve orthogonality between sample and scan line.
9. Repeat until features are oriented orthogonally with the scan frame.